"reduction of liquids to the form of a spray," 1860, noun of action from atomize. Perhaps based on earlier French atomisation.
Entries linking to atomization
atomize v.
1829, "reduce to atoms;" by 1860, "reduce a liquid to a very fine mist;" a verb formed from atom + -ize. Related: Atomized; atomizing. Originally in reference to medical treatment for injured or diseased lungs. A sense of "to destroy with atomic weapons" is attested from 1945.